An ultrathin nanoelectromechanical transducer made of hafnium zirconium oxide

Recently developed nanomechanical resonators that can operate at super-high (i.e., three to 30 GHz) and extremely high (30 to 300 GHz) frequency regimes could be extremely valuable for the development of more advanced semiconductor electronics such as wideband spectral processors and high-resolution resonant sensors. Integrated nanoelectromechanical transducers could enable the development of very small sensors and actuators to facilitate mechanical interaction with the outside world at the atomic level with ultra-high resolution. However, realizing integrated electromechanical transduction at the nanoscale has so far proved to be very challenging.